Regular paper

[OPTICAL REVIEW Vol. 18, No. 4 (2011) 357-359]
© 2011 The Japan Society of Applied Physics

Hollow Tube Fabrication in Photoresist Film Using Continuous Wave Laser

Masateru TOMIYASU^* and Chikara EGAMI

Department of Electrical and Electronic Engineering, Shizuoka University, Hamamatsu 432-8561, Japan

(Received March 8, 2011; Accepted April 13, 2011)

This paper is a study of three-dimensional (3D) micron/submicron fabrication with a continuous wave (CW) laser. The fabrication forms vertical and horizontal hollow tubes in a photoresist film with nonlinear optical properties. We controlled beam intensities and dose amounts to manipulate a reaction time constant of the photoresist; we fabricated the 3D hollows in high contrast.

Key words: CW laser, laser fabrication, photoresist, nonlinear optics, reaction time constant

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